Porous Ceramics Sealing Treatment for Semiconductor Gas Filters

Porous Ceramics Sealing Treatment for Semiconductor Gas Filters

A sealing treatment with dense alumina has been applied exclusively to the sides of a porous rod with micrometer-level pore diameters. We tried soaking the material in dye, and it absorbed from the end surface but did not seep through the sides.

Application: Semiconductor Gas Filters, etc.

Additionally, by sealing the outer circumference of porous ceramics, the following applications become possible:

Improved Efficiency of Gas and Liquid Filters

The sealing treatment controls the flow path of the porous ceramics used as filters, enabling efficient filtration. By preventing leakage from the outer circumference and directing the flow through specific paths, the performance of the filter can be enhanced.

Enhanced Precision in Semiconductor Manufacturing Processes

In semiconductor manufacturing, extremely high-purity gases and liquids are required. Sealing treatment helps prevent the contamination of unwanted substances, thereby improving the stability and precision of the process.

Increased Durability and Longevity

Sealing the outer circumference makes the ceramics more resistant to degradation, thereby enhancing their durability. This reduces the frequency of maintenance and replacement, leading to cost savings.

Improved Chemical Stability

The sealing treatment enhances the ceramic’s resistance to chemical attacks from external sources. This makes it usable even in harsh chemical environments, broadening its range of applications.

Enhanced Performance for Specific Applications

For example, in the biomedical field, sealed porous ceramics can be used for precise filters or controlled drug release. Sealing the outer circumference prevents drug leakage and efficiently delivers it to the targeted area.

Use as Insulation Material

Porous ceramics are also used as insulation materials. By sealing the outer circumference, the insulation performance is improved, preventing heat leakage. This allows for more effective use as insulation material.

Pollution Prevention and Purification

In environmental applications, filters made from porous ceramics are used for purifying air and water. Sealing treatment enhances the efficiency of the filters, making them more effective in removing pollutants.

By expanding the applications and improving the performance of porous ceramics through sealing treatment, the needs of various industries and fields can be met.

 

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